By H. H. Bau, H. Bau, N. F. DeRooij, B. Kloeck
'Sensors' is the 1st self-contained sequence to accommodate the entire quarter of sensors. It describes basic facets, technical and actual basics, building, functionality, purposes and advancements of some of the different types of sensors.This quantity includes the actual and technical basics of mechanical sensors, and comprises and assesses a few of the sorts of sensors for specific functions. Of curiosity to engineers, physicists, chemists and others interested in sensor expertise.
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Example text
The time constant of the sensor is about 10 ms. Higher responsivities viz 28 and 70 V W-I, have been achieved by designing more appropriate geometric microstructures [58] or using bidoped poly thermopiles [64], respectively. For certain spectral bands no additional material enhancing infrared absorption is needed, since the passivation layer as provided by the CMOS process shows strong absorption bands between 8 and 14 vm wavelength. The CMOS process also allows the inclusion of a metal layer Figure 2-33.
Investigations of the thermal and electrical conduction in thermoelectric films are described elsewhere [38-401 in more detail. Usually the z values of films are smaller than that of bulk materials. However, by appropriate annealing a considerableincrease in z can be achieved in some cases. Figure 2-14 shows the increase in some film transport parameters of the most efficient thermoelectric p-material (Bi, -xSbx)2Te3durK-' could be achieved, which ing annealing [41]. 9 * corresponds to the best bulk values.
For polysilicon films the phonon drag effect can be neglected [37]. Since a, and ahdepend on the carrier concentration, they are related to the electrical conductivity. 6 (k/q) In @/po) with po = 5 (2-34) f 2 m (see Figure 2-11). 1 1 Resistivity (am) Figure 2-11. Seebeck coefficient of silicon as a function of the electrical resistivity at 300 K. Symbols, experimental results; dashed line, Equation (2-34) (adapted from [20]). The condition I,, (( I,, holds for some practical thermoelectric materials, such as silicon and SiGe solid solutions.
