Shape Memory Microactuators by Manfred Kohl

By Manfred Kohl

Since the start of the nineties, form reminiscence alloys (SMA) became to be had for microsystems know-how. presently the breadth of analysis and improvement actions on SMA microactuators levels from natural medical issues of fabrics study to technological difficulties, resembling micromachining, integration and contacting. The publication supplies an summary of contemporary achievements, describing the improvement of microvalves and linear actuators comprehensively from inspiration via prototype. additional key points incorporated are third-dimensional versions for dealing with complicated SMA actuator geometries and paired simulation exercises that take multifunctional homes under consideration. Mechanical and thermal optimization standards are brought for actuator layout, permitting an optimal use of the form reminiscence influence. it's proven that a few of the prototypes provided, e.g. SMA microgrippers, already outperform traditional components.

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2) Structural transformations with the largest possible amount of shear lead to a pronounced memory effect. 2 Crystallographic Aspects ofMartensitic Transfonnations 35 (3) Negligible diffusion: The transformation temperatures must be in a range in which the jumping time is sufficiently long for atoms to interchange sites. (4) Reversibility: The mechanism of lattice-invariant deformation is of decisive importance to the reversibility of martensitic transformation. Crystallographic reversibility is ensured when lattice-invariant deformation occurs by twinning, while the formation of dislocations and stacking faults is avoided.

Linear movements are generated by a travelling wave. Small pins on the lower surface improve the friction contact with the base plate. So far, both feasibility and functionality of such actuators have been demonstrated. 2 Electrostatic Linear Actuators In the late eighties, electrostatic actuators were proposed as a promising method of generating movements in small dimensions [130]. Since then, numerous types have been developed for a variety of applications using both silicon and LIGA technology.

However, only twinning is reversible. This is why SMAs normally only show the process of lattice-invariant twinning (self-accommodation). In this way, shearing of the twins with different orientations is averaged out. The mechanism of self-accommodation not only causes the formation of lattice-invariant planes between the martensite and the austenite lattices (habit planes), but also gives rise to a clear decrease of straining. Consequently, when cooling without extemal loads, there is no shape change associated with the one-way effect.

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Shape Memory Microactuators by Manfred Kohl
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